JPH01165624U - - Google Patents
Info
- Publication number
- JPH01165624U JPH01165624U JP6150588U JP6150588U JPH01165624U JP H01165624 U JPH01165624 U JP H01165624U JP 6150588 U JP6150588 U JP 6150588U JP 6150588 U JP6150588 U JP 6150588U JP H01165624 U JPH01165624 U JP H01165624U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- quartz
- diffusion
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6150588U JPH01165624U (en]) | 1988-05-09 | 1988-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6150588U JPH01165624U (en]) | 1988-05-09 | 1988-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165624U true JPH01165624U (en]) | 1989-11-20 |
Family
ID=31287171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6150588U Pending JPH01165624U (en]) | 1988-05-09 | 1988-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165624U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015160747A (ja) * | 2014-02-25 | 2015-09-07 | ヤマハ株式会社 | カーボンナノチューブの製造装置 |
-
1988
- 1988-05-09 JP JP6150588U patent/JPH01165624U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015160747A (ja) * | 2014-02-25 | 2015-09-07 | ヤマハ株式会社 | カーボンナノチューブの製造装置 |